@inproceedings{0410a112001f4ef2b361eed921e49252,
title = "Optimal use of analog and binary lithography for planar-integrated free-space optics fabrication",
abstract = "For the fabrication of planar-integrated free-space optical (PIFSO) systems binary or analog lithography-based techniques can be used. The optimal choice or combination depends on system parameters like the targeted functionality, efficiency, reliability, and production cost. Our discussion is based on theoretical and experimental work in the field of optical interconnects.",
author = "Matthias Gruber and Wei, {An Chi} and J{\"u}rgen Jahns",
note = "Publisher Copyright: {\textcopyright} 2004 OSA/FIO 2004; Frontiers in Optics, FiO-2004 ; Conference date: 12-10-2004",
year = "2004",
language = "???core.languages.en_GB???",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
booktitle = "Frontiers in Optics, FiO-2004",
}