@inproceedings{70aa0513724f47149352a88e65861d2f,
title = "Optical properties of transparent diamond-like carbon thin films",
abstract = "Transparent diamond-like carbon thin films were made by radio frequency magnetron sputtering with methane and hexamethyldisiloxane as gas mixtures. Transmittance could reach 90 % with incorporation of hexamethyldisiloxane by increasing the silicon oxide structure.",
author = "Liao, {Yan Yu} and Liao, {Wei Bo} and Jaing, {Cheng Chung} and Chang, {Ya Chen} and Lee, {Cheng Chung} and Kuo, {Chien Cheng}",
note = "Publisher Copyright: {\textcopyright} OSA 2016.; null ; Conference date: 19-06-2016 Through 24-06-2016",
year = "2016",
doi = "10.1364/oic.2016.td.10",
language = "???core.languages.en_GB???",
isbn = "9781943580132",
series = "Optics InfoBase Conference Papers",
publisher = "OSA - The Optical Society",
booktitle = "Optical Interference Coatings, OIC 2016",
}