Optical properties of transparent diamond-like carbon thin films

Yan Yu Liao, Wei Bo Liao, Cheng Chung Jaing, Ya Chen Chang, Cheng Chung Lee, Chien Cheng Kuo

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations


Transparent diamond-like carbon thin films were made by radio frequency magnetron sputtering with methane and hexamethyldisiloxane as gas mixtures. Transmittance could reach 90 % with incorporation of hexamethyldisiloxane by increasing the silicon oxide structure.

Original languageEnglish
Title of host publicationOptical Interference Coatings, OIC 2016
PublisherOptica Publishing Group (formerly OSA)
ISBN (Print)9781943580132
StatePublished - 2016
EventOptical Interference Coatings, OIC 2016 - Tucson, United States
Duration: 19 Jun 201624 Jun 2016

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


ConferenceOptical Interference Coatings, OIC 2016
Country/TerritoryUnited States


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