Optical monitoring and real time admittance loci calculation through polarization interferometer

Cheng Chung Lee; Kai Wu; Sheng Hui Chen; Sheng Ju Ma

doi:10.1364/OE.15.017536

Optical monitoring and real time admittance loci calculation through polarization interferometer

Cheng Chung Lee, Kai Wu, Sheng Hui Chen, Sheng Ju Ma

Department of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.

Original language	English
Pages (from-to)	17536-17541
Number of pages	6
Journal	Optics Express
Volume	15
Issue number	26
DOIs	https://doi.org/10.1364/OE.15.017536
State	Published - 24 Dec 2007

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abstract = "A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.",

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AU - Wu, Kai

AU - Chen, Sheng Hui

AU - Ma, Sheng Ju

PY - 2007/12/24

Y1 - 2007/12/24

N2 - A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.

AB - A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.

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M3 - 期刊論文

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SN - 1094-4087

VL - 15

SP - 17536

EP - 17541

JO - Optics Express

JF - Optics Express

IS - 26

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Optical monitoring and real time admittance loci calculation through polarization interferometer

Abstract

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