Optical monitoring and real time admittance loci calculation through polarization interferometer

Cheng Chung Lee, Kai Wu, Sheng Hui Chen, Sheng Ju Ma

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

A simple, low coherence, vibration insensitive, polarization Fizeau interferometer is employed in this novel optical monitoring system proposed to extract the temporal phase change of the reflection coefficient of the growing film stacks. This system can directly detect fluctuating reflection coefficient and obtain the corresponding optical admittance of the growing film in real time.

Original languageEnglish
Pages (from-to)17536-17541
Number of pages6
JournalOptics Express
Volume15
Issue number26
DOIs
StatePublished - 24 Dec 2007

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