Optical heterodyne grating shearing interferometry for long-range positioning applications

Ju Yi Lee, Ming Pei Lu

Research output: Contribution to journalArticlepeer-review

21 Scopus citations


We develop a displacement measurement and positioning system with nanometer resolution over the millimeter traveling range. The method is based on a heterodyne grating shearing interferometry, a homemade lock-in amplifier and a servo control loop for displacement sensing and positioning. The quasi-common optical path configuration of our system provides better immunity against environmental disturbances. The experimental results demonstrate that our system can measure small and long displacement with nanometric resolution. The device achieves a positioning resolution of 2.3 nm over a traveling range of 20 mm.

Original languageEnglish
Pages (from-to)857-862
Number of pages6
JournalOptics Communications
Issue number3
StatePublished - 1 Feb 2011


  • Displacement
  • Grating
  • Heterodyne interferometry
  • Positioning
  • Shearing


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