Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution

Ju Yi Lee, Hui Yi Chen, Cheng Chih Hsu, Chyan Chyi Wu

Research output: Contribution to journalArticlepeer-review

71 Scopus citations

Abstract

A novel method for displacement measurement is presented. The measurement system includes a heterodyne light source, a moving grating and a lock-in amplifier for phase measurement. The optical phase variation, which stems from the grating movement, is measured by an optical heterodyne interferometer. The experimental results demonstrate that our system can measure small and long displacement with subnanometric resolution. The theoretical resolution is about 1 pm. By means of isolating the measurement system, the low frequency noise can be reduced, and when only high frequency noises are considered, our method can achieve measurement resolution of about 0.2 nm.

Original languageEnglish
Pages (from-to)185-191
Number of pages7
JournalSensors and Actuators, A: Physical
Volume137
Issue number1
DOIs
StatePublished - 12 Jun 2007

Keywords

  • Displacement
  • Grating
  • Heterodyne interferometry
  • Optical phase variation

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