Onset of blistering in hydrogen-implanted silicon

Keyphrases

• Implanted Silicon 100%
• Blister 100%
• Surface Blistering 100%
• Platelets 50%
• Atomic Force Microscopy 50%
• Silicon Surface 50%
• Implantation Depth 50%
• Multicrystalline Silicon 50%
• Optical Measurement 50%
• Hydrogen Pressure 50%
• Internal Hydrogen 50%
• Top-layer Thickness 50%

Engineering

• Critical Size 100%
• Platelet 50%
• Atomic Force Microscopy 50%
• Silicon Surface 50%
• Layer Thickness 50%
• Internals 50%
• Crystalline Silicon 50%