Numerical Study of Growth Rate and Purge Time in the AlN Pulsed MOCVD Process

Wei Jie Lin, Jyh Chen Chen

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Fingerprint

Dive into the research topics of 'Numerical Study of Growth Rate and Purge Time in the AlN Pulsed MOCVD Process'. Together they form a unique fingerprint.

Keyphrases

Engineering