Novel structure of controllable of photonic mirror fabricated by atomic layer deposition on nanosphere template

Shih Hao Chan, Wei Tin Lin, Wen Hao Cho, Chien Cheng Kuo, Cheng Chung Lee, Sheng Hui Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, a novel structure of controllable of photonic mirror (NSM) has been fabricated by atomic layer deposition (ALD) coating technique on a polystyrene (PS) nanosphere template. A 30nm ALD Al2O3 film was coated on the reduced PS nanopshere, the removal of PS nanosphere was burned in atmosphere at 300°C to form the Al2O3 hollow nanosphere, and then a 80nm indium tin oxide (ITO) film was sputtered on the hollow nanosphere as a top electrode. The results show that the application of NSM can control the reflectance with a tiny value of 0.003% per 0.1V of bias treatment.

Original languageEnglish
Title of host publicationOptical Interference Coatings, OIC 2013
StatePublished - 2013
EventOptical Interference Coatings, OIC 2013 - Whistler, Canada
Duration: 16 Jun 201321 Jun 2013

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceOptical Interference Coatings, OIC 2013
Country/TerritoryCanada
CityWhistler
Period16/06/1321/06/13

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