Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory

Jim Wei Wu; Jui Tse Weng; Ting Kuei Hsu; Shao An Chao; Bo Hao Chen

doi:10.1109/CACS55319.2022.9969847

Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory

Jim Wei Wu, Jui Tse Weng, Ting Kuei Hsu, Shao An Chao, Bo Hao Chen

Department of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

The piezoelectric stage is a high-precision actuator that is commonly applied in atomic force microscopy (AFM). However, the piezo-stage has inherent shortcomings like hysteresis and creep effects that inevitably cause unwanted distortion in the AFM scanned results. Therefore, in order to alleviate the nonlinear characteristics of the piezo-stage, we propose an advanced controller which combines the model predictive control (MPC) and the long short-term memory (LSTM) for application in a smooth spiral trajectory. Simulation results show the capability of our tracking improvements by using the proposed controller.

Original language	English
Title of host publication	2022 International Automatic Control Conference, CACS 2022
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781665496469
DOIs	https://doi.org/10.1109/CACS55319.2022.9969847
State	Published - 2022
Event	2022 International Automatic Control Conference, CACS 2022 - Kaohsiung, Taiwan Duration: 3 Nov 2022 → 6 Nov 2022

Publication series

Name	2022 International Automatic Control Conference, CACS 2022

Conference

Conference	2022 International Automatic Control Conference, CACS 2022
Country/Territory	Taiwan
City	Kaohsiung
Period	3/11/22 → 6/11/22

Keywords

Piezoelectric stage
atomic force microscopy
long short-term memory
model predictive control
spiral trajectory

Access to Document

10.1109/CACS55319.2022.9969847

AFR演算法開發與應用計畫
Wu, J.-W. . (PI)
1/06/22 → 31/05/23
Project: Research

Cite this

Wu, J. W., Weng, J. T., Hsu, T. K., Chao, S. A., & Chen, B. H. (2022). Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory. In 2022 International Automatic Control Conference, CACS 2022 (2022 International Automatic Control Conference, CACS 2022). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CACS55319.2022.9969847

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title = "Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory",

abstract = "The piezoelectric stage is a high-precision actuator that is commonly applied in atomic force microscopy (AFM). However, the piezo-stage has inherent shortcomings like hysteresis and creep effects that inevitably cause unwanted distortion in the AFM scanned results. Therefore, in order to alleviate the nonlinear characteristics of the piezo-stage, we propose an advanced controller which combines the model predictive control (MPC) and the long short-term memory (LSTM) for application in a smooth spiral trajectory. Simulation results show the capability of our tracking improvements by using the proposed controller.",

keywords = "Piezoelectric stage, atomic force microscopy, long short-term memory, model predictive control, spiral trajectory",

author = "Wu, {Jim Wei} and Weng, {Jui Tse} and Hsu, {Ting Kuei} and Chao, {Shao An} and Chen, {Bo Hao}",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 International Automatic Control Conference, CACS 2022 ; Conference date: 03-11-2022 Through 06-11-2022",

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doi = "10.1109/CACS55319.2022.9969847",

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Wu, JW, Weng, JT, Hsu, TK, Chao, SA & Chen, BH 2022, Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory. in 2022 International Automatic Control Conference, CACS 2022. 2022 International Automatic Control Conference, CACS 2022, Institute of Electrical and Electronics Engineers Inc., 2022 International Automatic Control Conference, CACS 2022, Kaohsiung, Taiwan, 3/11/22. https://doi.org/10.1109/CACS55319.2022.9969847

Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory. / Wu, Jim Wei; Weng, Jui Tse; Hsu, Ting Kuei et al.
2022 International Automatic Control Conference, CACS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. (2022 International Automatic Control Conference, CACS 2022).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory

AU - Wu, Jim Wei

AU - Weng, Jui Tse

AU - Hsu, Ting Kuei

AU - Chao, Shao An

AU - Chen, Bo Hao

PY - 2022

Y1 - 2022

N2 - The piezoelectric stage is a high-precision actuator that is commonly applied in atomic force microscopy (AFM). However, the piezo-stage has inherent shortcomings like hysteresis and creep effects that inevitably cause unwanted distortion in the AFM scanned results. Therefore, in order to alleviate the nonlinear characteristics of the piezo-stage, we propose an advanced controller which combines the model predictive control (MPC) and the long short-term memory (LSTM) for application in a smooth spiral trajectory. Simulation results show the capability of our tracking improvements by using the proposed controller.

AB - The piezoelectric stage is a high-precision actuator that is commonly applied in atomic force microscopy (AFM). However, the piezo-stage has inherent shortcomings like hysteresis and creep effects that inevitably cause unwanted distortion in the AFM scanned results. Therefore, in order to alleviate the nonlinear characteristics of the piezo-stage, we propose an advanced controller which combines the model predictive control (MPC) and the long short-term memory (LSTM) for application in a smooth spiral trajectory. Simulation results show the capability of our tracking improvements by using the proposed controller.

KW - Piezoelectric stage

KW - atomic force microscopy

KW - long short-term memory

KW - model predictive control

KW - spiral trajectory

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AN - SCOPUS:85144621136

T3 - 2022 International Automatic Control Conference, CACS 2022

BT - 2022 International Automatic Control Conference, CACS 2022

PB - Institute of Electrical and Electronics Engineers Inc.

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Y2 - 3 November 2022 through 6 November 2022

ER -

Wu JW, Weng JT, Hsu TK, Chao SA, Chen BH. Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory. In 2022 International Automatic Control Conference, CACS 2022. Institute of Electrical and Electronics Engineers Inc. 2022. (2022 International Automatic Control Conference, CACS 2022). doi: 10.1109/CACS55319.2022.9969847

Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory

Abstract

Publication series

Conference

Keywords

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AFR演算法開發與應用計畫

Cite this