Novel Control Design for Piezoelectric Stage to Achieve Fast and Precise Positioning of Spiral Trajectory

Jim Wei Wu, Jui Tse Weng, Ting Kuei Hsu, Shao An Chao, Bo Hao Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The piezoelectric stage is a high-precision actuator that is commonly applied in atomic force microscopy (AFM). However, the piezo-stage has inherent shortcomings like hysteresis and creep effects that inevitably cause unwanted distortion in the AFM scanned results. Therefore, in order to alleviate the nonlinear characteristics of the piezo-stage, we propose an advanced controller which combines the model predictive control (MPC) and the long short-term memory (LSTM) for application in a smooth spiral trajectory. Simulation results show the capability of our tracking improvements by using the proposed controller.

Original languageEnglish
Title of host publication2022 International Automatic Control Conference, CACS 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665496469
DOIs
StatePublished - 2022
Event2022 International Automatic Control Conference, CACS 2022 - Kaohsiung, Taiwan
Duration: 3 Nov 20226 Nov 2022

Publication series

Name2022 International Automatic Control Conference, CACS 2022

Conference

Conference2022 International Automatic Control Conference, CACS 2022
Country/TerritoryTaiwan
CityKaohsiung
Period3/11/226/11/22

Keywords

  • atomic force microscopy
  • long short-term memory
  • model predictive control
  • Piezoelectric stage
  • spiral trajectory

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