New observation of an abnormal leakage current in advanced CMOS devices with short channel lengths down to 50nm and beyond

E. R. Hsieh, Steve S. Chung, Y. H. Lin, C. H. Tsai, P. W. Liu, C. T. Tsai, G. H. Ma, S. C. Chien, S. W. Sun

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Engineering & Materials Science