The fabrication, spectroscopic properties, and laser performance of Nd 3+-doped Ta 2O 5 channel waveguide lasers are described. Lasing is obtained at both 1.066 and 1.375 μm with threshold pump powers as low as 2.7 mW. The rib waveguides are reactive-ion-etched into Nd:Ta 2O 5 layers formed by reactive magnetron sputtering. These high-index low-loss rare-earth-doped waveguides are fabricated on silicon substrates and offer the potential for integration with photonic crystal structures for compact optical circuits.
|Number of pages||9|
|Journal||IEEE Journal of Quantum Electronics|
|State||Published - Dec 2005|
- Integrated optics