Nb-doped TiO2 transparent conducting coating by pulse DC magnetron co-sputtering

Ssu Hsiang Peng, Chien Cheng Kuo, Meng Chi Li, Shu Hui Tsai, Cheng Chung Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Nb doped TiO2 (TNO) is a promising transparent conducting oxide suitable for many applications such as in solar cells, OLEDs, LEDs, FPDs, touch panels, etc. TNO thin film was deposited on an unheated glass substrate by pulsed direct current (DC) magnetron co-sputtering. After annealing in a vacuum (<9×10-6 Torr) at 370°C for 10 minutes, the film crystallized into a polycrystalline anatase TiO2 structure, the resistivity decreased to 4.5×10-4 ω-cm and the average transmittance increased to above 70% in the visible light region. The influence of annealing on the TNO amorphous-to-anatase phase transition, decrease in the resistivity and increase in the average transmittance will be discussed.

Original languageEnglish
Title of host publicationCurrent Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI
DOIs
StatePublished - 2010
EventCurrent Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI - San Diego, CA, United States
Duration: 1 Aug 20103 Aug 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7786
ISSN (Print)0277-786X

Conference

ConferenceCurrent Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI
Country/TerritoryUnited States
CitySan Diego, CA
Period1/08/103/08/10

Keywords

  • Annealing
  • Magnetron co-sputtering
  • Transparent conducting oxide

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