Native-conflict-aware wire perturbation for double patterning technology

Szu Yu Chen, Yao Wen Chang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

22 Scopus citations

Abstract

The double patterning technology (DPT), in which a dense layout pattern is decomposed into two separate masks to relax its pitch, is the most popular lithography solution for the sub-22nm node to enhance pattern printability. Previous works focus on stitch insertion to improve the decomposition success rate. However, there exist native conflicts (NC's) which cannot be resolved by any kind of stitch insertion. A design with NC's is not DPT-compliance and will eventually fail the decomposition, resulting in DFM redesign and longer design cycles. In this paper, we give a sufficient condition for the NC existence and propose a geometry-based method for NC prediction to develop an early stage analyzer for DPT decomposability checking. Then, a wire perturbation algorithm is presented to fix as many NC's in the layout as possible. The algorithm is based on iterative 1D-compaction and can easily be embedded into existing industrial compaction systems. Experimental results show that the proposed algorithm can significantly reduce the number of NC's by an average of 85%, which can effectively increase the decomposition success rate for the next stage.

Original languageEnglish
Title of host publication2010 IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2010
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages556-561
Number of pages6
ISBN (Print)9781424481927
DOIs
StatePublished - 2010
Event2010 IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2010 - San Jose, United States
Duration: 7 Nov 201011 Nov 2010

Publication series

NameIEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers, ICCAD
ISSN (Print)1092-3152

Conference

Conference2010 IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2010
Country/TerritoryUnited States
CitySan Jose
Period7/11/1011/11/10

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