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Nanothick layer transfer of hydrogen-implanted wafer using polysilicon sacrificial layer
C. H. Huang, C. L. Chang, Y. Y. Yang, T. Suryasindhu, W. C. Liao, Y. H. Su, P. W. Li, C. Y. Liu, C. S. Lai, J. H. Ting, C. S. Chu, C. S. Lee, T. H. Lee
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review