Nanostructures on epitaxial SiGe films on silicon

L. J. Chen; W. W. Wu; S. W. Lee; H. C. Chen; T. H. Yang

Nanostructures on epitaxial SiGe films on silicon

L. J. Chen, W. W. Wu, S. W. Lee, H. C. Chen, T. H. Yang

Graduate Institute of Materials Science and Engineering

Research output: Contribution to conference › Paper › peer-review

1 Scopus citations

Abstract

Nanodots and nano-rings are basic building blocks of nanostructures. Si_1-xGe_x heterostructures are attractive for electronic and optoelectronic devices. In this paper, we review the recent progresses in the growth of metal silicide quantum dot arrays and Si-Ge quantum rings on epitaxial SiGe thin films on silicon.

Original language	English
Pages	241-252
Number of pages	12
State	Published - 2004
Event	State-of-the-Art Program on Compound Semiconductors XL (SOTAPOCS XL) and Narrow Bandgap Optoelectronic Materials and Devices II - Proceedings of the International Symposium - San Antonio, TX, United States Duration: 9 May 2004 → 14 May 2004

Conference

Conference	State-of-the-Art Program on Compound Semiconductors XL (SOTAPOCS XL) and Narrow Bandgap Optoelectronic Materials and Devices II - Proceedings of the International Symposium
Country/Territory	United States
City	San Antonio, TX
Period	9/05/04 → 14/05/04

Cite this

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title = "Nanostructures on epitaxial SiGe films on silicon",

abstract = "Nanodots and nano-rings are basic building blocks of nanostructures. Si1-xGex heterostructures are attractive for electronic and optoelectronic devices. In this paper, we review the recent progresses in the growth of metal silicide quantum dot arrays and Si-Ge quantum rings on epitaxial SiGe thin films on silicon.",

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Nanostructures on epitaxial SiGe films on silicon. / Chen, L. J.; Wu, W. W.; Lee, S. W. et al.

2004. 241-252 Paper presented at State-of-the-Art Program on Compound Semiconductors XL (SOTAPOCS XL) and Narrow Bandgap Optoelectronic Materials and Devices II - Proceedings of the International Symposium, San Antonio, TX, United States.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Nanostructures on epitaxial SiGe films on silicon

AU - Chen, L. J.

AU - Wu, W. W.

AU - Lee, S. W.

AU - Chen, H. C.

AU - Yang, T. H.

PY - 2004

Y1 - 2004

N2 - Nanodots and nano-rings are basic building blocks of nanostructures. Si1-xGex heterostructures are attractive for electronic and optoelectronic devices. In this paper, we review the recent progresses in the growth of metal silicide quantum dot arrays and Si-Ge quantum rings on epitaxial SiGe thin films on silicon.

AB - Nanodots and nano-rings are basic building blocks of nanostructures. Si1-xGex heterostructures are attractive for electronic and optoelectronic devices. In this paper, we review the recent progresses in the growth of metal silicide quantum dot arrays and Si-Ge quantum rings on epitaxial SiGe thin films on silicon.

UR - http://www.scopus.com/inward/record.url?scp=5744243355&partnerID=8YFLogxK

M3 - 會議論文

AN - SCOPUS:5744243355

SP - 241

EP - 252

Y2 - 9 May 2004 through 14 May 2004

ER -

Nanostructures on epitaxial SiGe films on silicon

Abstract

Conference

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