Nanoscale thick layer transfer of hydrogen-implanted wafer by using polycrystalline silicon sacrificial layer

Keyphrases

• Thick Layer 100%
• Wafer 100%
• Polysilicon 100%
• Layer Transfer 100%
• Sacrificial Layer 100%
• Silicon-on-insulator 33%
• Implantation Depth 33%
• Thinning Process 33%
• Channeling Effect 33%
• Si Layer 33%
• Nanometre 33%
• Smart-cut 33%
• Reimplantation 33%
• Layer Method 33%
• Polycrystalline Si 33%
• Thick Silicon 33%
• Transfer Layer 33%

Engineering

• Nanoscale 100%
• Thick Layer 100%
• Polysilicon 100%
• Thin Films 50%
• Nanometre 50%
• Polycrystalline 50%
• Implant 50%
• Thinning Process 50%
• Silicon on Insulator 50%
• Channelling 50%

Material Science

• Silicon 100%
• Thin Films 33%