Nanophotonics based cantilever sensor

Chengkuo Lee, Jayaraj Thillaigovindan, Chii Chang Chen, Xian Tong Chen, Ya Ting Chao, Shaohua Tao, Wenfeng Xiang, Aibin Yu, Hanhua Feng, G. Q. Lo

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


We present design and simulation results of a novel nanomechanical sensor using a silicon cantilever comprising two-dimensional (2-D) photonic crystal (PC) microcavity resonator structure. A U-shaped silicon line defect in a 2-D photonic crystal is considered as a waveguide for confining light propagation within waveguide, while two-hole pairs are placed along this silicon waveguide as a optical reflector. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the microcavity resonator. The minimum detectable strain, vertical deflection at the cantilever end, and force load are observed as 0.0136%, 0.94(j.m and 0.046 jiN for 50(xm cantilever. The measured strain is a linear function of resonant wavelength shift and applied force. This new sensing shows promising features for biomolecules detection.

Original languageEnglish
Title of host publication2008 IEEE PhotonicsGlobal at Singapore, IPGC 2008
StatePublished - 2008
Event2008 IEEE PhotonicsGlobal at Singapore, IPGC 2008 - Singapore, Singapore
Duration: 8 Dec 200811 Dec 2008

Publication series

Name2008 IEEE PhotonicsGlobal at Singapore, IPGC 2008


Conference2008 IEEE PhotonicsGlobal at Singapore, IPGC 2008


  • μ-TAS
  • Nanomechanical
  • Nanophotonics
  • Sensors


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