Nanoindentation on a-plane ZnO thin films

Engineering & Materials Science

• Nanoindentation 100%
• Thin films 78%
• Atomic force microscopy 42%
• Temperature 33%
• X ray diffraction 32%
• Epilayers 28%
• Hardness 26%
• Hall effect 22%
• Sapphire 22%
• Sputtering 21%
• X ray diffraction analysis 20%
• Structural properties 17%
• Elastic moduli 13%
• Surface roughness 13%
• Substrates 11%
• Friction 11%
• Mechanical properties 10%

Chemical Compounds

• Grain Size 77%
• Atomic Force Microscopy 43%
• X-Ray Diffraction 40%
• Sputtering 29%
• Young's Modulus 29%
• Surface Roughness 27%