Nanoimprinting pre-patterned effects on anodic aluminum oxide

Sheng Hui Chen, Der Sheng Chan, Chun Ko Chen, Te Hung Chang, Yuh Hui Lai, Cheng Chung Lee

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

Periodic concaves have been fabricated on the initial aluminum surface using nanoimprint and anodization processes to obtain high order nanostructured anodic aluminum oxide (AAO) arrays. The effect of the pattern design process on the one- and two-dimensional structures is investigated. Both the experimental and simulation results show that the interpore distance and the location of dissolutions in the aluminum sheet affect the strength and are dependent on the pattern design under high applied voltage. The results show that the interpore distance in the AAO is limited and the initial sites of dissolution are restricted to the inner corner/electrolyte interface.

Original languageEnglish
Article number015201
JournalJapanese Journal of Applied Physics
Volume49
Issue number1 Part 1
DOIs
StatePublished - 2010

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