Nano-structured diffractive optical elements on SiNX membrane for UV-visible regime applications

Chien Chieh Lee, Chih Ming Wang, Che Lung Xu, Jing Yi Chen, Jenq Yang Chang, Yi Ming Liao, Gou Chung Chi

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations


Silicon nitride (SiNX) film is a commonly used material in silicon technology. In addition, it has excellent optical properties. It is transparent in both the UV and visible range, with a high refractive index of about 1.7-2. Owing to its superior mechanical and optical properties, we used a silicon nitride membrane as an optical phase element. We will fabricate nano-structured diffractive optical elements, such as wave-plate, polarizer, and polarized beam splitter on SiNXHY membrane by e-beam lithography for the UV-visible regime applications. The SiNXHY membranes were made from SiNXHY films deposited by an plasma enhanced chemical vapor deposition (PECVD) as an alternative method for low stress membrane fabrication used in UV-visible transmittance. The stress of silicon nitride film showed a change from compressive to tensile with increasing working pressure during film deposition. The UV-visible transmittance of the free standing membrane was measured, which showed that UV light is transparent at wavelength as short as 240nm. We will show the feasibility to fabricate nano-structured diffractive optical elements on the SiNXHY membrane combined with microoptoelectromechanical systems (MOEMS) technology for the application in the UV-visible regimes.

Original languageEnglish
Article number26
Pages (from-to)170-179
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2004
EventNanoengineering: Fabrication, Properties, Optics, and Devices - Denver, CO, United States
Duration: 4 Aug 20046 Aug 2004


  • Diffractive optical elements
  • Microoptoelectromechanical systems
  • SiNx membrane
  • UV
  • Visible


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