Multilayered MOEMS tunable spectrometer for fluorescence lifetime detection

Joe Fu Jiou Lo, Pramod Butte, Qiyin Fang, Shih Jui Chen, Thanassis Papaioanou, Eun Sok Kim, Martin Gundersen, Laura Marcu

Research output: Contribution to journalArticlepeer-review


Spectral and time-domain fluorescence from biological samples are powerful diagnostic tools. For applications requiring a compact integrated spectrometer, the microoptoelectromechanical system (MOEMS) is an enabling technology. To improve upon previous microspectrometers, a multilayered, folded design is taken here to improve theoretical resolution and throughput. This sub-cm3 prototype, based on MOEMS piezoelectric diffractive micrograting, demonstrates over 100-nm tuning in the visible range. Moreover, it integrates a microlens with f = 2,2 mm within a microoptics package that is fabricated at wafer-level. The microspectrometer capably records both spectral and lifetime information for fluorescence standards fluorescein isothiocyanate (FITC, 2.5 ns) and Rhodamine B (2.9 ns), and also Collagen Type II (2.4 ns).

Original languageEnglish
Article number5404999
Pages (from-to)486-488
Number of pages3
JournalIEEE Photonics Technology Letters
Issue number7
StatePublished - 1 Apr 2010


  • Microlens
  • Microspectrometer
  • Multilayer
  • Piezoelectric
  • Wafer-level packaging


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