Multi-electrolyte-step anodic aluminum oxide method for the fabrication of self-organized nanochannel arrays

Chun Ko Chen, Sheng Hui Chen

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

Nanochannel arrays were fabricated by the self-organized multi-electrolyte-step anodic aluminum oxide [AAO] method in this study. The anodization conditions used in the multi-electrolyte-step AAO method included a phosphoric acid solution as the electrolyte and an applied high voltage. There was a change in the phosphoric acid by the oxalic acid solution as the electrolyte and the applied low voltage. This method was used to produce self-organized nanochannel arrays with good regularity and circularity, meaning less power loss and processing time than with the multi-step AAO method.

Original languageEnglish
Article number122
JournalNanoscale Research Letters
Volume7
DOIs
StatePublished - 2012

Keywords

  • Anodic aluminum oxide
  • Multi-electrolyte-step
  • Nanochannel array

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