Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface

Yi Cheng Huang; Mou Sheng Lin; Che Ming Liu; Jyh Chen Chen

Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface

Yi Cheng Huang, Mou Sheng Lin, Che Ming Liu, Jyh Chen Chen

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such few hundred nanometers size of the nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by the scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system for scanning-by-probe AFM. Experimental results validate the AFM featured with large scanning positioning, fast imaging and maximum 20 nm positioning error resolution.

Original language	English
Pages (from-to)	257-265
Number of pages	9
Journal	Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Volume	25
Issue number	3
State	Published - Jun 2004

Keywords

Mg-Al spinel nanocrystal
Piezoelectric motion stage
Scanning-by-probe atomic force microscopy

Cite this

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title = "Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface",

abstract = "The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such few hundred nanometers size of the nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by the scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system for scanning-by-probe AFM. Experimental results validate the AFM featured with large scanning positioning, fast imaging and maximum 20 nm positioning error resolution.",

keywords = "Mg-Al spinel nanocrystal, Piezoelectric motion stage, Scanning-by-probe atomic force microscopy",

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year = "2004",

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}

Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface. / Huang, Yi Cheng; Lin, Mou Sheng; Liu, Che Ming et al.
In: Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao, Vol. 25, No. 3, 06.2004, p. 257-265.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface

AU - Huang, Yi Cheng

AU - Lin, Mou Sheng

AU - Liu, Che Ming

AU - Chen, Jyh Chen

PY - 2004/6

Y1 - 2004/6

N2 - The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such few hundred nanometers size of the nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by the scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system for scanning-by-probe AFM. Experimental results validate the AFM featured with large scanning positioning, fast imaging and maximum 20 nm positioning error resolution.

AB - The Mg-Al spinel nanocrystals were successfully grown at the etching pits of sapphire single crystal surface by precipitation. However, observation for such few hundred nanometers size of the nanocrystals requires the resolution of Scanning Electron Microscopy (SEM) or Atomic Force Microscopy (AFM). Scanning distance by the scanning-by-probe AFM is constrained when the sample size is large in comparison with the size of nanocrystal. This study presents the design of a piezoelectric-driven motion system for scanning-by-probe AFM. Experimental results validate the AFM featured with large scanning positioning, fast imaging and maximum 20 nm positioning error resolution.

KW - Mg-Al spinel nanocrystal

KW - Piezoelectric motion stage

KW - Scanning-by-probe atomic force microscopy

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M3 - 期刊論文

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SP - 257

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JO - Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

JF - Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

IS - 3

ER -

Motion stage design with scanning-by-probe AFM for imaging nanocrystals on sapphire surface

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Keywords

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