Monolithic low sideband guided-mode resonance filter based on two-layer structure

Che Lung Hsu, Yu Hong Chou, Chih Ming Wang, Jenq Yang Chang, Chien Chieh Lee

Research output: Contribution to journalConference articlepeer-review


In this paper, fabrication an optical filter based on guided-mode resonance (GMR) effect in a silicon nitride (SiNx) membrane by silicon bulk micromachining technologies is demonstrated. Such a filter has advantages of simple structure, high efficiency and it is potential to be integrated with other developed optoelectronic elements into an integrated micro systems. The design consideration, fabrication procedures and measured spectral response are shown in this paper.

Original languageEnglish
Article number593116
Pages (from-to)1-8
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2005
EventNanoengineering: Fabrication, Properties, Optics, and Devices II - San Diego, CA, United States
Duration: 3 Aug 20054 Aug 2005


  • Guided-mode resonance
  • Resonant grating
  • Si bulk micromachining


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