Monolithic low sideband guided-mode resonance filter based on two-layer structure

Che Lung Hsu; Yu Hong Chou; Chih Ming Wang; Jenq Yang Chang; Chien Chieh Lee

doi:10.1117/12.616749

Monolithic low sideband guided-mode resonance filter based on two-layer structure

Che Lung Hsu, Yu Hong Chou, Chih Ming Wang, Jenq Yang Chang, Chien Chieh Lee

Research output: Contribution to journal › Conference article › peer-review

Abstract

In this paper, fabrication an optical filter based on guided-mode resonance (GMR) effect in a silicon nitride (SiN_x) membrane by silicon bulk micromachining technologies is demonstrated. Such a filter has advantages of simple structure, high efficiency and it is potential to be integrated with other developed optoelectronic elements into an integrated micro systems. The design consideration, fabrication procedures and measured spectral response are shown in this paper.

Original language	English
Article number	593116
Pages (from-to)	1-8
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5931
DOIs	https://doi.org/10.1117/12.616749
State	Published - 2005
Event	Nanoengineering: Fabrication, Properties, Optics, and Devices II - San Diego, CA, United States Duration: 3 Aug 2005 → 4 Aug 2005

Keywords

Guided-mode resonance
Resonant grating
Si bulk micromachining

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10.1117/12.616749

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@article{26688e88b3b544b59732aa458b4b3116,

title = "Monolithic low sideband guided-mode resonance filter based on two-layer structure",

abstract = "In this paper, fabrication an optical filter based on guided-mode resonance (GMR) effect in a silicon nitride (SiNx) membrane by silicon bulk micromachining technologies is demonstrated. Such a filter has advantages of simple structure, high efficiency and it is potential to be integrated with other developed optoelectronic elements into an integrated micro systems. The design consideration, fabrication procedures and measured spectral response are shown in this paper.",

keywords = "Guided-mode resonance, Resonant grating, Si bulk micromachining",

author = "Hsu, {Che Lung} and Chou, {Yu Hong} and Wang, {Chih Ming} and Chang, {Jenq Yang} and Lee, {Chien Chieh}",

year = "2005",

doi = "10.1117/12.616749",

language = "???core.languages.en_GB???",

volume = "5931",

pages = "1--8",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "Nanoengineering: Fabrication, Properties, Optics, and Devices II ; Conference date: 03-08-2005 Through 04-08-2005",

}

TY - JOUR

T1 - Monolithic low sideband guided-mode resonance filter based on two-layer structure

AU - Hsu, Che Lung

AU - Chou, Yu Hong

AU - Wang, Chih Ming

AU - Chang, Jenq Yang

AU - Lee, Chien Chieh

PY - 2005

Y1 - 2005

N2 - In this paper, fabrication an optical filter based on guided-mode resonance (GMR) effect in a silicon nitride (SiNx) membrane by silicon bulk micromachining technologies is demonstrated. Such a filter has advantages of simple structure, high efficiency and it is potential to be integrated with other developed optoelectronic elements into an integrated micro systems. The design consideration, fabrication procedures and measured spectral response are shown in this paper.

AB - In this paper, fabrication an optical filter based on guided-mode resonance (GMR) effect in a silicon nitride (SiNx) membrane by silicon bulk micromachining technologies is demonstrated. Such a filter has advantages of simple structure, high efficiency and it is potential to be integrated with other developed optoelectronic elements into an integrated micro systems. The design consideration, fabrication procedures and measured spectral response are shown in this paper.

KW - Guided-mode resonance

KW - Resonant grating

KW - Si bulk micromachining

UR - http://www.scopus.com/inward/record.url?scp=31744438139&partnerID=8YFLogxK

U2 - 10.1117/12.616749

DO - 10.1117/12.616749

M3 - 會議論文

AN - SCOPUS:31744438139

SN - 0277-786X

VL - 5931

SP - 1

EP - 8

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 593116

T2 - Nanoengineering: Fabrication, Properties, Optics, and Devices II

Y2 - 3 August 2005 through 4 August 2005

ER -

Monolithic low sideband guided-mode resonance filter based on two-layer structure

Abstract

Keywords

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