Modification of structure and property in Zr-based thin film metallic glass via processing temperature control

Jia Hong Chu, Hsien Wei Chen, Yu Chen Chan, Jenq Gong Duh, Jyh Wei Lee, Jason Shian Ching Jang

Research output: Contribution to journalArticlepeer-review

33 Scopus citations

Abstract

The aims of this study are to fabricate the Zr-Cu-Ni-Al thin film metallic glass (TFMG) on silicon substrates by DC magnetron sputtering with single target and to investigate the characteristics of coatings with various substrate temperatures. All the coatings exhibit similar structural and thermal properties, yet the hardness increases with processing temperature. It is demonstrated that amorphous matrix and cluster structure are slightly affected by the processing temperatures due to high cooling rate during deposition and superior glass-forming ability. Besides, atoms and clusters can acquire extra energy via heating substrate to stabilize each cluster, and the amount of free volume is reduced. Thus, the hardness increases with substrate temperature owing to the resistance to the shear band propagation. In summary, this study integrates the correlations among microstructure, thermal and mechanical properties, providing a convenient approach to tune TFMG coating performance.

Original languageEnglish
Pages (from-to)38-42
Number of pages5
JournalThin Solid Films
Volume561
DOIs
StatePublished - 30 Jun 2014

Keywords

  • Microstructure
  • Sputtering
  • Substrate heating
  • Thin film metallic glass

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