Modelling of nitrogen plasma parameters in a ferro-electric packed bed barrier discharge

K. Takaki, M. B. Chang, T. Kawasaki, T. Ohkubo, S. Kanazawa, T. Nomoto, J. S. Chang

Research output: Contribution to journalArticlepeer-review

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Abstract

The effect of pellets dielectric constants, applied voltage and operating frequencies on plasma parameters in a ferroelectric packed bed barrier discharge was studied. Pure nitrogen plasma was used to develop a chemical kinetic model for prediction of ion and radical species. The electron density was found to increase with increase in applied voltage, dielectric constant and applied voltage frequency. Analysis suggested that metastable nitrogen was produced by recombination of ions while radical atoms were generated by direct electron impact processes.

Original languageEnglish
Article number84
Pages (from-to)373-376
Number of pages4
JournalConference on Electrical Insulation and Dielectric Phenomena (CEIDP), Annual Report
DOIs
StatePublished - 2001

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