Model to determine the self-resonant frequency of micromachined spiral inductors

C. C. Chen; Cheng De Lin; Y. T. Cheng

doi:10.1063/1.2346371

Model to determine the self-resonant frequency of micromachined spiral inductors

C. C. Chen, Cheng De Lin, Y. T. Cheng

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

This letter presents an approach to characterize electron behaviors within polygonal micromachined spiral inductors in which self-resonance occurs. Combining with the concepts of anomalous dispersion, standing wave, and field scattering, the self-resonant frequency of the microinductors can be calculated by means of an associated analytical model. According to this model the self-resonant frequency (SRF) can be derived as the "free electron" frequency of the inductor material. Simulation and measurement results validate that the model can provide a satisfactory prediction to the SRF of polygonal micromachined spiral inductors.

Original language	English
Article number	103521
Journal	Applied Physics Letters
Volume	89
Issue number	10
DOIs	https://doi.org/10.1063/1.2346371
State	Published - 2006

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title = "Model to determine the self-resonant frequency of micromachined spiral inductors",

abstract = "This letter presents an approach to characterize electron behaviors within polygonal micromachined spiral inductors in which self-resonance occurs. Combining with the concepts of anomalous dispersion, standing wave, and field scattering, the self-resonant frequency of the microinductors can be calculated by means of an associated analytical model. According to this model the self-resonant frequency (SRF) can be derived as the {"}free electron{"} frequency of the inductor material. Simulation and measurement results validate that the model can provide a satisfactory prediction to the SRF of polygonal micromachined spiral inductors.",

author = "Chen, {C. C.} and Lin, {Cheng De} and Cheng, {Y. T.}",

note = "Funding Information: This work was supported by the NSC 94-2220-E-009-002 project and in part by MediaTek research center and FY 95 ITRI/STC/JDRC at National Chiao Tung University. ",

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T1 - Model to determine the self-resonant frequency of micromachined spiral inductors

AU - Chen, C. C.

AU - Lin, Cheng De

AU - Cheng, Y. T.

N1 - Funding Information: This work was supported by the NSC 94-2220-E-009-002 project and in part by MediaTek research center and FY 95 ITRI/STC/JDRC at National Chiao Tung University.

PY - 2006

Y1 - 2006

N2 - This letter presents an approach to characterize electron behaviors within polygonal micromachined spiral inductors in which self-resonance occurs. Combining with the concepts of anomalous dispersion, standing wave, and field scattering, the self-resonant frequency of the microinductors can be calculated by means of an associated analytical model. According to this model the self-resonant frequency (SRF) can be derived as the "free electron" frequency of the inductor material. Simulation and measurement results validate that the model can provide a satisfactory prediction to the SRF of polygonal micromachined spiral inductors.

AB - This letter presents an approach to characterize electron behaviors within polygonal micromachined spiral inductors in which self-resonance occurs. Combining with the concepts of anomalous dispersion, standing wave, and field scattering, the self-resonant frequency of the microinductors can be calculated by means of an associated analytical model. According to this model the self-resonant frequency (SRF) can be derived as the "free electron" frequency of the inductor material. Simulation and measurement results validate that the model can provide a satisfactory prediction to the SRF of polygonal micromachined spiral inductors.

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JO - Applied Physics Letters

JF - Applied Physics Letters

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Model to determine the self-resonant frequency of micromachined spiral inductors

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