Model to determine the self-resonant frequency of micromachined spiral inductors

C. C. Chen, Cheng De Lin, Y. T. Cheng

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


This letter presents an approach to characterize electron behaviors within polygonal micromachined spiral inductors in which self-resonance occurs. Combining with the concepts of anomalous dispersion, standing wave, and field scattering, the self-resonant frequency of the microinductors can be calculated by means of an associated analytical model. According to this model the self-resonant frequency (SRF) can be derived as the "free electron" frequency of the inductor material. Simulation and measurement results validate that the model can provide a satisfactory prediction to the SRF of polygonal micromachined spiral inductors.

Original languageEnglish
Article number103521
JournalApplied Physics Letters
Issue number10
StatePublished - 2006


Dive into the research topics of 'Model to determine the self-resonant frequency of micromachined spiral inductors'. Together they form a unique fingerprint.

Cite this