Miniaturized amperometric solid electrolyte carbon dioxide sensors

G. W. Hunter, J. C. Xu, C. C. Liu, J. W. Hammond, B. Ward, D. Lukco, P. Lampard, M. Artale, D. Androjna

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations


A miniaturized electrochemical carbon dioxide (CO2) sensor using Na3Zr2Si2PO12 (NASICON) as a solid electrolyte has been fabricated and demonstrated. Microfabrication techniques were used for sensor fabrication to yield a sensing area around 1.0 mm × 1.1 mm. The NASICON solid electrolyte and the Na2CO 3/BaCO3 (1:1.7 molar ratio) auxiliary electrolyte were deposited by sputtering in between and on top of the interdigitated finger-shaped platinum electrodes. This structure maximizes the length of the three-phase boundary (electrode, solid electrolyte, and auxiliary electrolyte), which is critical for gas sensing. The robust CO2 sensor operated up to 600°C in an amperometric mode and attempts were made to optimize sensor operating parameters. Concentrations of CO2 between 0.02% and 4% were detected and the overall sensor performance was evaluated. Linear response of sensor current output to ln[CO2 concentration] ranging from 0.02% to 1% was achieved. copyright The Electrochemical Society.

Original languageEnglish
Title of host publicationChemical Sensors 7 -and- MEMS/NEMS 7
PublisherElectrochemical Society Inc.
Number of pages9
ISBN (Electronic)1566775108
StatePublished - 2006
EventChemical Sensors 7 -and- MEMS/NEMS 7 - 210th Electrochemical Society Meeting - Cancun, Mexico
Duration: 29 Oct 20063 Nov 2006

Publication series

NameECS Transactions
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737


ConferenceChemical Sensors 7 -and- MEMS/NEMS 7 - 210th Electrochemical Society Meeting


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