Microoptical element on SiN membrane

J. Y. Chang; Y. C. Chang; C. C. Lee; C. M. Wang

doi:10.1117/12.504415

Microoptical element on SiN membrane

J. Y. Chang, Y. C. Chang, C. C. Lee, C. M. Wang

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

Optical elements, such as grating, holographic optical element and Fresnel lens, are made on the SiN membrane. The SiN film was deposited on the silicon wafer by low pressure chemical vapor deposition (LPCVD). Its advantages include the high transmission efficiency, light weight, and easy packaging for the Si-based optical pickup head.

Original language	English
Pages (from-to)	61-70
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5183
DOIs	https://doi.org/10.1117/12.504415
State	Published - 2003
Event	Lithographic and Micromachining Techniques for Optical Component Fabrication II - San Diego, CA, United States Duration: 3 Aug 2003 → 4 Aug 2003

Keywords

Anisotropic etching
Grating
Microoptics
SiN film

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10.1117/12.504415

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title = "Microoptical element on SiN membrane",

abstract = "Optical elements, such as grating, holographic optical element and Fresnel lens, are made on the SiN membrane. The SiN film was deposited on the silicon wafer by low pressure chemical vapor deposition (LPCVD). Its advantages include the high transmission efficiency, light weight, and easy packaging for the Si-based optical pickup head.",

keywords = "Anisotropic etching, Grating, Microoptics, SiN film",

author = "Chang, {J. Y.} and Chang, {Y. C.} and Lee, {C. C.} and Wang, {C. M.}",

year = "2003",

doi = "10.1117/12.504415",

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TY - JOUR

T1 - Microoptical element on SiN membrane

AU - Chang, J. Y.

AU - Chang, Y. C.

AU - Lee, C. C.

AU - Wang, C. M.

PY - 2003

Y1 - 2003

N2 - Optical elements, such as grating, holographic optical element and Fresnel lens, are made on the SiN membrane. The SiN film was deposited on the silicon wafer by low pressure chemical vapor deposition (LPCVD). Its advantages include the high transmission efficiency, light weight, and easy packaging for the Si-based optical pickup head.

AB - Optical elements, such as grating, holographic optical element and Fresnel lens, are made on the SiN membrane. The SiN film was deposited on the silicon wafer by low pressure chemical vapor deposition (LPCVD). Its advantages include the high transmission efficiency, light weight, and easy packaging for the Si-based optical pickup head.

KW - Anisotropic etching

KW - Grating

KW - Microoptics

KW - SiN film

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U2 - 10.1117/12.504415

DO - 10.1117/12.504415

M3 - 會議論文

AN - SCOPUS:2342630012

SN - 0277-786X

VL - 5183

SP - 61

EP - 70

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Lithographic and Micromachining Techniques for Optical Component Fabrication II

Y2 - 3 August 2003 through 4 August 2003

ER -

Microoptical element on SiN membrane

Abstract

Keywords

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