Microoptical element on SiN membrane

J. Y. Chang, Y. C. Chang, C. C. Lee, C. M. Wang

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


Optical elements, such as grating, holographic optical element and Fresnel lens, are made on the SiN membrane. The SiN film was deposited on the silicon wafer by low pressure chemical vapor deposition (LPCVD). Its advantages include the high transmission efficiency, light weight, and easy packaging for the Si-based optical pickup head.

Original languageEnglish
Pages (from-to)61-70
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2003
EventLithographic and Micromachining Techniques for Optical Component Fabrication II - San Diego, CA, United States
Duration: 3 Aug 20034 Aug 2003


  • Anisotropic etching
  • Grating
  • Microoptics
  • SiN film


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