Micromachined plastic W-band bandpass filters

Firas Sammoura; Yiin Kuen Fuh; Liwei Lin

doi:10.1016/j.sna.2008.03.005

Micromachined plastic W-band bandpass filters

Firas Sammoura, Yiin Kuen Fuh, Liwei Lin

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

Results are presented for micromachined plastic waveguide bandpass iris filters for W-band applications using a cost-effective polymer micro hot embossing process in conjunction with metallic electroplating and sealing techniques. The prototype filter has an 8-μm thick electroplated gold layer on a polymeric WR-10 waveguide with a 5-cavity Chebyschev-type design. Measurement results show center frequency of 96.77 GHz with a bandwidth of 3.15%, a loaded quality factor 31.73 and an unloaded quality factor for a single cavity resonator is 1210.6, respectively. A minimum insertion loss of -1.22 dB and return loss of better than -9.3 dB have been measured over the entire passband.

Original language	English
Pages (from-to)	47-51
Number of pages	5
Journal	Sensors and Actuators, A: Physical
Volume	147
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2008.03.005
State	Published - 15 Sep 2008

Keywords

Electroplating
GHz
Iris filters
Microwave engineering
Millimeter waves
Plastic hot embossing
RF-MEMS

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10.1016/j.sna.2008.03.005

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title = "Micromachined plastic W-band bandpass filters",

abstract = "Results are presented for micromachined plastic waveguide bandpass iris filters for W-band applications using a cost-effective polymer micro hot embossing process in conjunction with metallic electroplating and sealing techniques. The prototype filter has an 8-μm thick electroplated gold layer on a polymeric WR-10 waveguide with a 5-cavity Chebyschev-type design. Measurement results show center frequency of 96.77 GHz with a bandwidth of 3.15%, a loaded quality factor 31.73 and an unloaded quality factor for a single cavity resonator is 1210.6, respectively. A minimum insertion loss of -1.22 dB and return loss of better than -9.3 dB have been measured over the entire passband.",

keywords = "Electroplating, GHz, Iris filters, Microwave engineering, Millimeter waves, Plastic hot embossing, RF-MEMS",

author = "Firas Sammoura and Fuh, {Yiin Kuen} and Liwei Lin",

note = "Funding Information: This project is supported in part by a NSF grant DMI-0428884 and these devices were fabricated in the UC-Berkeley Microfabrication Laboratory and the Mechanical Engineering Machine Shop. The authors would like to thank Mr. Ron Wilson for taking the SEM pictures, Mr. John Morton from the Mechanical Engineering Department machine shop for fabricating the mold inserts, Professor J.C. Chiao of University at Texas, Arlington and Professors Jack Welch and Ali Niknejad at UC Berkeley for valuable discussions, and Mr. Bill Kwan from Agilent Technologies for his support on the experiments. ",

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T1 - Micromachined plastic W-band bandpass filters

AU - Sammoura, Firas

AU - Fuh, Yiin Kuen

AU - Lin, Liwei

N1 - Funding Information: This project is supported in part by a NSF grant DMI-0428884 and these devices were fabricated in the UC-Berkeley Microfabrication Laboratory and the Mechanical Engineering Machine Shop. The authors would like to thank Mr. Ron Wilson for taking the SEM pictures, Mr. John Morton from the Mechanical Engineering Department machine shop for fabricating the mold inserts, Professor J.C. Chiao of University at Texas, Arlington and Professors Jack Welch and Ali Niknejad at UC Berkeley for valuable discussions, and Mr. Bill Kwan from Agilent Technologies for his support on the experiments.

PY - 2008/9/15

Y1 - 2008/9/15

N2 - Results are presented for micromachined plastic waveguide bandpass iris filters for W-band applications using a cost-effective polymer micro hot embossing process in conjunction with metallic electroplating and sealing techniques. The prototype filter has an 8-μm thick electroplated gold layer on a polymeric WR-10 waveguide with a 5-cavity Chebyschev-type design. Measurement results show center frequency of 96.77 GHz with a bandwidth of 3.15%, a loaded quality factor 31.73 and an unloaded quality factor for a single cavity resonator is 1210.6, respectively. A minimum insertion loss of -1.22 dB and return loss of better than -9.3 dB have been measured over the entire passband.

AB - Results are presented for micromachined plastic waveguide bandpass iris filters for W-band applications using a cost-effective polymer micro hot embossing process in conjunction with metallic electroplating and sealing techniques. The prototype filter has an 8-μm thick electroplated gold layer on a polymeric WR-10 waveguide with a 5-cavity Chebyschev-type design. Measurement results show center frequency of 96.77 GHz with a bandwidth of 3.15%, a loaded quality factor 31.73 and an unloaded quality factor for a single cavity resonator is 1210.6, respectively. A minimum insertion loss of -1.22 dB and return loss of better than -9.3 dB have been measured over the entire passband.

KW - Electroplating

KW - GHz

KW - Iris filters

KW - Microwave engineering

KW - Millimeter waves

KW - Plastic hot embossing

KW - RF-MEMS

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U2 - 10.1016/j.sna.2008.03.005

DO - 10.1016/j.sna.2008.03.005

M3 - 期刊論文

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SN - 0924-4247

VL - 147

SP - 47

EP - 51

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

IS - 1

ER -

Micromachined plastic W-band bandpass filters

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Keywords

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