Microfabricated thin-film microelectrode for amperometric determination of CO2 in the gas phase

Zhong Bai Zhou, Qing Hai Wu, Chung Chiun Liu

Research output: Contribution to journalArticlepeer-review

17 Scopus citations


A thin-film platinum microelectrode has been produced using microfabrication techniques. This microelectrode behaves identically to the inlaid microdisk electrode. The fabricated thin-film microelectrode device is used for amperometric determination of CO2 at room temperature. The microsensor shows a 90% response time of 30 s, a sensitivity of approximately 9 nA/% the reproducibility of the sensor is good for 6 h of continuous operation. However, these performance characteristic are affected by electrochemical crosstalk between the electrodes under long-tem operating conditions.

Original languageEnglish
Pages (from-to)101-108
Number of pages8
JournalSensors and Actuators, B: Chemical
Issue number2
StatePublished - Aug 1994


  • Carbon dioxide sensors
  • Microfabrication techniques
  • Thin-film microelectrode


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