Abstract
Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication (MEMS-based) technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.
| Original language | English |
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| Pages | D11-1-D11-8 |
| State | Published - 1998 |
| Event | Proceedings of the 1998 17th AIAA/IEEE/SAE Digital Avionics Systems Conference, DASC. Part 1 (of 2) - Bellevue, WA, USA Duration: 31 Oct 1998 → 7 Nov 1998 |
Conference
| Conference | Proceedings of the 1998 17th AIAA/IEEE/SAE Digital Avionics Systems Conference, DASC. Part 1 (of 2) |
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| City | Bellevue, WA, USA |
| Period | 31/10/98 → 7/11/98 |