Microelectronic sensors for simultaneous measurement of PO2 and pH.

C. C. Liu, M. R. Neuman, L. T. Romankiw, E. B. Makovos

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


Sensors capable of simultaneous measurement of pH and PO2 in an aqueous solution have been fabricated in planar form using microelectronic technology. Separate potentiometric metal-metal oxide pH and three electrode amperemetric PO2 sensors have been fabricated together on a silicon chip with active surface of 2 x 3 mm. Rhodium-rhodium oxide electrodes operating in a cyclic voltammetry mode have also been studied and show sensitivity to both pH and PO2 in different regions of the voltage swept curve.

Original languageEnglish
Pages (from-to)295-298
Number of pages4
JournalAdvances in experimental medicine and biology
StatePublished - 1987


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