Microelectromagnetic energy harvester with integrated magnets

Q. Zhang, S. J. Chen, L. Baumgartel, A. Lin, E. S. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

20 Scopus citations

Abstract

This paper presents a microelectromagnetic power generator with integrated magnets that can be fabricated on silicon wafers in a batch process. The generator is fabricated by MEMS technologies and characterized at different vibration frequencies, amplitudes and load resistances. This compact generator occupies a volume of 15×13×0.4mm3, as no external permanent magnets are needed. Experimental results show that with a 20-turn spiral coil, the device can generate an induced electromotive force (EMF) of 0.27mV at a vibration frequency and amplitude of 350Hz and 10m, respectively.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1657-1660
Number of pages4
DOIs
StatePublished - 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 5 Jun 20119 Jun 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/TerritoryChina
CityBeijing
Period5/06/119/06/11

Keywords

  • Energy harvester
  • integrated magnets
  • microelectromagnetic power generator

Fingerprint

Dive into the research topics of 'Microelectromagnetic energy harvester with integrated magnets'. Together they form a unique fingerprint.

Cite this