Micro-anode Guided Electroplating (MAGE) control system

D. L. Lee, J. C. Lin, P. F. Kao, S. B. Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This article releases the details of the equipment development for the micro-anode guided electroplating MAGE fabrication. The microstepping architecture, electroplating power source, control system architecture, measurement system, man machine interface and the control prodedure will be described. Metallic columns around 100 micrometers in diameter were fabricated up to 2cm long with this equipment to demonstrate its performance. An innovative intermittent MAGE mode is supported by this equipment so that it can produce micro columns of finer surface morphology and better circumferential uniformity than the conventional continuous electroplating.

Original languageEnglish
Title of host publicationProgress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
PublisherTrans Tech Publications Ltd
Pages115-120
Number of pages6
EditionPART 1
ISBN (Print)0878499903, 9780878499908
DOIs
StatePublished - 2006
Event2005 International Conference on Advanced Manufacture, ICAM2005 - Taipei, R.O.C., Taiwan
Duration: 28 Nov 20052 Dec 2005

Publication series

NameMaterials Science Forum
NumberPART 1
Volume505-507
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

Conference2005 International Conference on Advanced Manufacture, ICAM2005
Country/TerritoryTaiwan
CityTaipei, R.O.C.
Period28/11/052/12/05

Keywords

  • 3D micro-structure
  • Localized electro-deposition
  • MAGE
  • Micro-anode guided electroplating
  • Micro-fabrication

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