Mechanical and thermal behaviors of nitrogen-doped Zr-Cu-Al-Ag-Ta - An alternative class of thin film metallic glass

Pao Sheng Chen, Hsien Wei Chen, Jenq Gong Duh, Jyh Wei Lee, Jason Shian Ching Jang

Research output: Contribution to journalArticlepeer-review

20 Scopus citations

Abstract

Super-plasticity and nano-scale surface roughness make thin film metallic glass (TFMG) a candidate for master mold of micro/nano imprint technique. Meanwhile, better mechanical properties of TFMG undoubtedly expand the life time of master mold. In this study, nitrogen is doped into Zr-based TFMG to exhibit the hardness higher than 10 GPa. Different from elements used to be doped into metallic glass, the role of nitrogen atoms plays in metallic glass is distinct and vital owing to its strong electronegativity. From the correlation of thermal and mechanical behavior, the role and effect of nitrogen in Ta-Zr-Cu-Al-Ag TFMG is discussed and proposed.

Original languageEnglish
Article number181902
JournalApplied Physics Letters
Volume101
Issue number18
DOIs
StatePublished - 29 Oct 2012

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