Mechanical and thermal behaviors of nitrogen-doped Zr-Cu-Al-Ag-Ta - An alternative class of thin film metallic glass

Pao Sheng Chen; Hsien Wei Chen; Jenq Gong Duh; Jyh Wei Lee; Jason Shian Ching Jang

doi:10.1063/1.4759035

Mechanical and thermal behaviors of nitrogen-doped Zr-Cu-Al-Ag-Ta - An alternative class of thin film metallic glass

Pao Sheng Chen, Hsien Wei Chen, Jenq Gong Duh, Jyh Wei Lee, Jason Shian Ching Jang

Graduate Institute of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

Abstract

Super-plasticity and nano-scale surface roughness make thin film metallic glass (TFMG) a candidate for master mold of micro/nano imprint technique. Meanwhile, better mechanical properties of TFMG undoubtedly expand the life time of master mold. In this study, nitrogen is doped into Zr-based TFMG to exhibit the hardness higher than 10 GPa. Different from elements used to be doped into metallic glass, the role of nitrogen atoms plays in metallic glass is distinct and vital owing to its strong electronegativity. From the correlation of thermal and mechanical behavior, the role and effect of nitrogen in Ta-Zr-Cu-Al-Ag TFMG is discussed and proposed.

Original language	English
Article number	181902
Journal	Applied Physics Letters
Volume	101
Issue number	18
DOIs	https://doi.org/10.1063/1.4759035
State	Published - 29 Oct 2012

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title = "Mechanical and thermal behaviors of nitrogen-doped Zr-Cu-Al-Ag-Ta - An alternative class of thin film metallic glass",

abstract = "Super-plasticity and nano-scale surface roughness make thin film metallic glass (TFMG) a candidate for master mold of micro/nano imprint technique. Meanwhile, better mechanical properties of TFMG undoubtedly expand the life time of master mold. In this study, nitrogen is doped into Zr-based TFMG to exhibit the hardness higher than 10 GPa. Different from elements used to be doped into metallic glass, the role of nitrogen atoms plays in metallic glass is distinct and vital owing to its strong electronegativity. From the correlation of thermal and mechanical behavior, the role and effect of nitrogen in Ta-Zr-Cu-Al-Ag TFMG is discussed and proposed.",

author = "Chen, {Pao Sheng} and Chen, {Hsien Wei} and Duh, {Jenq Gong} and Lee, {Jyh Wei} and Jang, {Jason Shian Ching}",

note = "Funding Information: The authors appreciate the financial support from the National Science Council, Taiwan, R.O.C. through Contract Number NSC-099B3034J4. We are grateful to the assistance in EPMA analysis in Precision Instrument Center at National Tsing Hua University and DSC measurement of Jinn P. Chu Lab at National Taiwan University of Science and Technology (NTUST).",

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AU - Chen, Pao Sheng

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AU - Duh, Jenq Gong

AU - Lee, Jyh Wei

AU - Jang, Jason Shian Ching

N1 - Funding Information: The authors appreciate the financial support from the National Science Council, Taiwan, R.O.C. through Contract Number NSC-099B3034J4. We are grateful to the assistance in EPMA analysis in Precision Instrument Center at National Tsing Hua University and DSC measurement of Jinn P. Chu Lab at National Taiwan University of Science and Technology (NTUST).

PY - 2012/10/29

Y1 - 2012/10/29

N2 - Super-plasticity and nano-scale surface roughness make thin film metallic glass (TFMG) a candidate for master mold of micro/nano imprint technique. Meanwhile, better mechanical properties of TFMG undoubtedly expand the life time of master mold. In this study, nitrogen is doped into Zr-based TFMG to exhibit the hardness higher than 10 GPa. Different from elements used to be doped into metallic glass, the role of nitrogen atoms plays in metallic glass is distinct and vital owing to its strong electronegativity. From the correlation of thermal and mechanical behavior, the role and effect of nitrogen in Ta-Zr-Cu-Al-Ag TFMG is discussed and proposed.

AB - Super-plasticity and nano-scale surface roughness make thin film metallic glass (TFMG) a candidate for master mold of micro/nano imprint technique. Meanwhile, better mechanical properties of TFMG undoubtedly expand the life time of master mold. In this study, nitrogen is doped into Zr-based TFMG to exhibit the hardness higher than 10 GPa. Different from elements used to be doped into metallic glass, the role of nitrogen atoms plays in metallic glass is distinct and vital owing to its strong electronegativity. From the correlation of thermal and mechanical behavior, the role and effect of nitrogen in Ta-Zr-Cu-Al-Ag TFMG is discussed and proposed.

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Mechanical and thermal behaviors of nitrogen-doped Zr-Cu-Al-Ag-Ta - An alternative class of thin film metallic glass

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