Super-plasticity and nano-scale surface roughness make thin film metallic glass (TFMG) a candidate for master mold of micro/nano imprint technique. Meanwhile, better mechanical properties of TFMG undoubtedly expand the life time of master mold. In this study, nitrogen is doped into Zr-based TFMG to exhibit the hardness higher than 10 GPa. Different from elements used to be doped into metallic glass, the role of nitrogen atoms plays in metallic glass is distinct and vital owing to its strong electronegativity. From the correlation of thermal and mechanical behavior, the role and effect of nitrogen in Ta-Zr-Cu-Al-Ag TFMG is discussed and proposed.