Abstract
A new method for measuring the effective optical constants and the flying-heights with only an optical set-up by using the heterodyne interferometry is proposed. At first, a set of special equations for describing the relations among the phase differences of s-polarization with respect to p-polarization, the effective optical constants, and the flying-heights, are derived from the Fresnel's equations and the effects of multi-beam interferences. And the effective optical constants can be obtained from the conditions for the extreme points, which can be accurately determined with a heterodyne interferometer. Substituting the optical constants into the special equations which we derived previously, the flying-heights can be estimated.
| Original language | English |
|---|---|
| Pages (from-to) | 40-43 |
| Number of pages | 4 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3740 |
| State | Published - 1999 |
| Event | Proceedings of the 1999 Optical Engineering for Sensing and Nanotechnology (ICOSN '99) - Yokohama, Jpn Duration: 16 Jun 1999 → 18 Jun 1999 |