@inproceedings{e27f22a9a3364371bd85e72031c3ba79,
title = "Measurements of nanometer surface structure by incoherent confocal laser-feedback",
abstract = "An optical scanning microscope is developed using the confocal laser feedback technique on a superluminescent laser diode with bias current detection capable of measuring surface structure with 20 nm depth resolution and micrometers dynamic range. This paper describes the measurement techniques of nanometer surface structure using incoherent confocal laser feedback.",
author = "Deng, {Kung Li} and Lu, {Chun Hung} and Jyhpyng Wang and Cheng, {Po Hsiu}",
year = "1994",
language = "???core.languages.en_GB???",
isbn = "0780319710",
series = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting",
publisher = "Publ by IEEE",
booktitle = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting",
note = "Proceedings of the Conference on Lasers and Electro-Optics ; Conference date: 08-05-1994 Through 13-05-1994",
}