Measurement verification of line smoothness and surface roughness of micro products fabricated by two-photon polymerization

Tien Tung Chung, Chia Ping Hung, Chang Li Tseng, Chin Te Lin, Patrice L. Baldeck

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper studies the quality of lines and surfaces fabricated by the two-photon polymerization (TPP) technology. Micro lines and surfaces fabricated by TPP are accumulation of micro spots, and their external shapes can be simulated and predicted from manufacturing parameters, such as laser power, exposure time, scanning speed, spot gap, and line gap. The correctness of predicted shapes is verified by measuring product shapes by SEM and AFM. The purpose of this study is to find the best parameters for increasing line smoothness and reducing surface roughness. Firstly, the total energy absorbed in each point within the work piece space is simulated by adding up all the laser spots of the scanning path. The point with absorbed exposure energy exceeding the resin threshold energy forms a polymerized spot of the product, and the product shape can be obtained. Secondly, micro lines and surfaces with different manufacturing parameters are fabricated and product shapes are measured by both SEM and AFM. The simulated shape and the measured shape of the product with specific manufacturing parameters are compared. Shapes from simulation and fabrication have the same trend. Results of this study can be applied in manufacturing TPP products with complex shapes for better surface quality.

Original languageEnglish
Title of host publicationEighth International Symposium on Precision Engineering Measurements and Instrumentation
DOIs
StatePublished - 2013
Event8th International Symposium on Precision Engineering Measurements and Instrumentation - Chengdu, China
Duration: 8 Aug 201211 Aug 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8759
ISSN (Print)0277-786X

Conference

Conference8th International Symposium on Precision Engineering Measurements and Instrumentation
Country/TerritoryChina
CityChengdu
Period8/08/1211/08/12

Keywords

  • line smoothness
  • micro fabrication
  • surface roughness
  • Two-photon polymerization
  • voxel

Fingerprint

Dive into the research topics of 'Measurement verification of line smoothness and surface roughness of micro products fabricated by two-photon polymerization'. Together they form a unique fingerprint.

Cite this