Measurement improvement by high overlapping density subaperture stitching interferometry

Hung Sheng Chang, Chao Wen Liang, Po Chih Lin, Yi Chun Chen

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

The vibration-modulated subaperture stitching interferometer acquires the interferogram on the fly dynamically. With its highly improved measurement throughput, we applied the device for high overlapping density subaperture stitching interferometry to acquire hundreds of overlapping subapertures in a single phase stitching measurement. The averaging effect of the high overlapping density stitching interferometer is discussed. In the experiment, the proposed high overlapping density stitching interferometer is also proved to reduce measurement uncertainty and improve measurement quality effectively.

Original languageEnglish
Pages (from-to)H102-H108
JournalApplied Optics
Volume53
Issue number29
DOIs
StatePublished - 10 Oct 2014

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