Machining characteristics of magnetic force-assisted electrolytic machining for polycrystalline silicon

Po Huai Yu, Jung Chou Hung, Shin Min Lee, Kun Ling Wu, Biing Hwa Yan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Wire electrical discharge machining (WEDM) of polycrystalline silicon (polysilicon) involves high-temperature melting that easily produces cracks on the silicon surface. This paper studies improvements of cracks and craters on surface of polysilicon after wire electrical discharge machining (WEDM) by magnetic force-assisted electrolytic machining (MFA-EM). The effects of different MFA-EM parameters on material removal and surface roughness are explored to understand the machining characteristics of MFA-EM and how magnetic field assistance contributes to high-efficiency and high-quality machining. Experimental results show that compared with standard EM, MFA-EM can achieve better machining efficiency and surface quality because MFA-EM can effectively enhance electrolyte circulation and replenishment, which contributes to better machining stability.

Original languageEnglish
Title of host publicationAdvances in Abrasive Technology XIV
Pages523-529
Number of pages7
DOIs
StatePublished - 2011
Event14th International Symposium on Advances in Abrasive Technology, ISAAT 2011 - Stuttgart, Germany
Duration: 18 Sep 201121 Sep 2011

Publication series

NameAdvanced Materials Research
Volume325
ISSN (Print)1022-6680

Conference

Conference14th International Symposium on Advances in Abrasive Technology, ISAAT 2011
Country/TerritoryGermany
CityStuttgart
Period18/09/1121/09/11

Keywords

  • Crack
  • Electrolytic machining (EM)
  • Magnetic force
  • Polysilicon
  • Wire electrical discharge machining (WEDM)

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