Low temperature bonding of PMMA and COC microfluidic substrates using UV/ozone surface treatment

C. W. Tsao; L. Hromada; J. Liu; P. Kumar; D. L. DeVoe

doi:10.1039/b618901f

Low temperature bonding of PMMA and COC microfluidic substrates using UV/ozone surface treatment

C. W. Tsao, L. Hromada, J. Liu, P. Kumar, D. L. DeVoe

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

219 Scopus citations

Abstract

The use of UV/ozone surface treatments for achieving low temperature bonds between PMMA and COC microfluidic substrates is evaluated. Low temperature bond strengths, approaching those of native polymer substrates bonded above their glass transition temperatures, are demonstrated for both thermoplastics. To evaluate the effects of the UV/O₃ surface treatment on the operation of bonded microfluidic devices, the relationship between UV/O₃ exposure and polymer hydrophilicity and surface chemistry are measured. Post-treatment surface chemistry is evaluated by XPS (X-ray photoelectron spectroscopy) analysis, and the stability of the treated surfaces following solvent exposure is reported. Electroosmotic flow within fabricated microchannels with modified wall surfaces is also characterized. Overall, UV/O₃ treatment is found to enable strong low temperature bonds between thermoplastic microfluidic substrates using a simple, low cost, and high throughput fabrication technology.

Original language	English
Pages (from-to)	499-505
Number of pages	7
Journal	Lab on a Chip
Volume	7
Issue number	4
DOIs	https://doi.org/10.1039/b618901f
State	Published - 2007

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abstract = "The use of UV/ozone surface treatments for achieving low temperature bonds between PMMA and COC microfluidic substrates is evaluated. Low temperature bond strengths, approaching those of native polymer substrates bonded above their glass transition temperatures, are demonstrated for both thermoplastics. To evaluate the effects of the UV/O3 surface treatment on the operation of bonded microfluidic devices, the relationship between UV/O3 exposure and polymer hydrophilicity and surface chemistry are measured. Post-treatment surface chemistry is evaluated by XPS (X-ray photoelectron spectroscopy) analysis, and the stability of the treated surfaces following solvent exposure is reported. Electroosmotic flow within fabricated microchannels with modified wall surfaces is also characterized. Overall, UV/O3 treatment is found to enable strong low temperature bonds between thermoplastic microfluidic substrates using a simple, low cost, and high throughput fabrication technology.",

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AU - Tsao, C. W.

AU - Hromada, L.

AU - Liu, J.

AU - Kumar, P.

AU - DeVoe, D. L.

PY - 2007

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N2 - The use of UV/ozone surface treatments for achieving low temperature bonds between PMMA and COC microfluidic substrates is evaluated. Low temperature bond strengths, approaching those of native polymer substrates bonded above their glass transition temperatures, are demonstrated for both thermoplastics. To evaluate the effects of the UV/O3 surface treatment on the operation of bonded microfluidic devices, the relationship between UV/O3 exposure and polymer hydrophilicity and surface chemistry are measured. Post-treatment surface chemistry is evaluated by XPS (X-ray photoelectron spectroscopy) analysis, and the stability of the treated surfaces following solvent exposure is reported. Electroosmotic flow within fabricated microchannels with modified wall surfaces is also characterized. Overall, UV/O3 treatment is found to enable strong low temperature bonds between thermoplastic microfluidic substrates using a simple, low cost, and high throughput fabrication technology.

AB - The use of UV/ozone surface treatments for achieving low temperature bonds between PMMA and COC microfluidic substrates is evaluated. Low temperature bond strengths, approaching those of native polymer substrates bonded above their glass transition temperatures, are demonstrated for both thermoplastics. To evaluate the effects of the UV/O3 surface treatment on the operation of bonded microfluidic devices, the relationship between UV/O3 exposure and polymer hydrophilicity and surface chemistry are measured. Post-treatment surface chemistry is evaluated by XPS (X-ray photoelectron spectroscopy) analysis, and the stability of the treated surfaces following solvent exposure is reported. Electroosmotic flow within fabricated microchannels with modified wall surfaces is also characterized. Overall, UV/O3 treatment is found to enable strong low temperature bonds between thermoplastic microfluidic substrates using a simple, low cost, and high throughput fabrication technology.

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Low temperature bonding of PMMA and COC microfluidic substrates using UV/ozone surface treatment

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