Littrow-type self-aligned laser encoder with high tolerance using double diffractions

Chyan Chyi Wu; Cheng Chih Hsu; Ju Yi Lee; Yan Zou Chen; Jhih Sheng Yang

doi:10.1016/j.optcom.2013.01.048

Littrow-type self-aligned laser encoder with high tolerance using double diffractions

Chyan Chyi Wu, Cheng Chih Hsu, Ju Yi Lee, Yan Zou Chen, Jhih Sheng Yang

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

This study proposes a Littrow-type self-aligned laser encoder system (LisaLENS) with double diffractions. The LisaLENS has simple optical paths, facilitating alignment and manufacture, and fewer optical components than current laser encoders. This study analyzes the theoretical measurement resolution of this system and verifies the feasibilities of its long- and short-range measurements through experiments. Experimental results show that the LisaLENS has a resolution of 5.5±1.4 nm. Thus, this design has wide applications in various fields, especially for monitoring the displacement and vibration of precision-motorized stages. Crown

Original language	English
Pages (from-to)	89-97
Number of pages	9
Journal	Optics Communications
Volume	297
DOIs	https://doi.org/10.1016/j.optcom.2013.01.048
State	Published - 15 Jun 2013

Keywords

Displacement
Grating
Littrow
Long range

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10.1016/j.optcom.2013.01.048

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title = "Littrow-type self-aligned laser encoder with high tolerance using double diffractions",

abstract = "This study proposes a Littrow-type self-aligned laser encoder system (LisaLENS) with double diffractions. The LisaLENS has simple optical paths, facilitating alignment and manufacture, and fewer optical components than current laser encoders. This study analyzes the theoretical measurement resolution of this system and verifies the feasibilities of its long- and short-range measurements through experiments. Experimental results show that the LisaLENS has a resolution of 5.5±1.4 nm. Thus, this design has wide applications in various fields, especially for monitoring the displacement and vibration of precision-motorized stages. Crown",

keywords = "Displacement, Grating, Littrow, Long range",

author = "Wu, {Chyan Chyi} and Hsu, {Cheng Chih} and Lee, {Ju Yi} and Chen, {Yan Zou} and Yang, {Jhih Sheng}",

note = "Funding Information: The authors would like to acknowledge the support of the National Science Council (NSC) 98–2218-E-032-009- , 99–2628-E-032-001- , and 100–2628-E-032-001- ). We also thank Mr. M.H. Wen (E-Pin Optical Industry Company, Taiwan) and Professor C.K. Lee (National Taiwan University) for providing us with access to equipment. ",

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AU - Wu, Chyan Chyi

AU - Hsu, Cheng Chih

AU - Lee, Ju Yi

AU - Chen, Yan Zou

AU - Yang, Jhih Sheng

N1 - Funding Information: The authors would like to acknowledge the support of the National Science Council (NSC) 98–2218-E-032-009- , 99–2628-E-032-001- , and 100–2628-E-032-001- ). We also thank Mr. M.H. Wen (E-Pin Optical Industry Company, Taiwan) and Professor C.K. Lee (National Taiwan University) for providing us with access to equipment.

PY - 2013/6/15

Y1 - 2013/6/15

N2 - This study proposes a Littrow-type self-aligned laser encoder system (LisaLENS) with double diffractions. The LisaLENS has simple optical paths, facilitating alignment and manufacture, and fewer optical components than current laser encoders. This study analyzes the theoretical measurement resolution of this system and verifies the feasibilities of its long- and short-range measurements through experiments. Experimental results show that the LisaLENS has a resolution of 5.5±1.4 nm. Thus, this design has wide applications in various fields, especially for monitoring the displacement and vibration of precision-motorized stages. Crown

AB - This study proposes a Littrow-type self-aligned laser encoder system (LisaLENS) with double diffractions. The LisaLENS has simple optical paths, facilitating alignment and manufacture, and fewer optical components than current laser encoders. This study analyzes the theoretical measurement resolution of this system and verifies the feasibilities of its long- and short-range measurements through experiments. Experimental results show that the LisaLENS has a resolution of 5.5±1.4 nm. Thus, this design has wide applications in various fields, especially for monitoring the displacement and vibration of precision-motorized stages. Crown

KW - Displacement

KW - Grating

KW - Littrow

KW - Long range

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U2 - 10.1016/j.optcom.2013.01.048

DO - 10.1016/j.optcom.2013.01.048

M3 - 期刊論文

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SN - 0030-4018

VL - 297

SP - 89

EP - 97

JO - Optics Communications

JF - Optics Communications

ER -

Littrow-type self-aligned laser encoder with high tolerance using double diffractions

Abstract

Keywords

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