Lithium niobate thin films on diamond/silicon substrates for surface acoustic wave filter device applications

Thomas A. Rabson, Jiun Ting Lee, Tai Chou Lee, Shunxi Wang, Marc A. Robert

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

Piezoelectricity and surface acoustic wave (SAW) propagation of a LiNbO 3/diamond/silicon multilayer structure are reported for the first time. Theoretical calculations predict lithium niobate thin films on diamond/silicon substrates have both high SAW propagation velocities and high electromechanical coupling coefficients. The metal-organic decomposition (MOD) technique is used to grow lithium niobate thin films on diamond/silicon substrates. X-ray diffraction analysis shows that the lithium niobate films are polycrystalline. SAW devices are fabricated by depositing interdigital transducers (EDTs) onto the LiNbO 3/diamond/silicon films. The SAW activities are observed by measuring the frequency response of the SAW device.

Original languageEnglish
Pages (from-to)81-90
Number of pages10
JournalIntegrated Ferroelectrics
Volume41
Issue number1-4
DOIs
StatePublished - 2001

Keywords

  • Diamond
  • Lithium Niobate
  • Surface acoustic wave

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