Lithium niobate thin films on diamond/silicon substrates for surface acoustic wave filter device applications

Thomas A. Rabson; Jiun Ting Lee; Tai Chou Lee; Shunxi Wang; Marc A. Robert

doi:10.1080/10584580108012810

Lithium niobate thin films on diamond/silicon substrates for surface acoustic wave filter device applications

Thomas A. Rabson, Jiun Ting Lee, Tai Chou Lee, Shunxi Wang, Marc A. Robert

Department of Chemical and Materials Engineering

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

Piezoelectricity and surface acoustic wave (SAW) propagation of a LiNbO ₃/diamond/silicon multilayer structure are reported for the first time. Theoretical calculations predict lithium niobate thin films on diamond/silicon substrates have both high SAW propagation velocities and high electromechanical coupling coefficients. The metal-organic decomposition (MOD) technique is used to grow lithium niobate thin films on diamond/silicon substrates. X-ray diffraction analysis shows that the lithium niobate films are polycrystalline. SAW devices are fabricated by depositing interdigital transducers (EDTs) onto the LiNbO ₃/diamond/silicon films. The SAW activities are observed by measuring the frequency response of the SAW device.

Original language	English
Pages (from-to)	81-90
Number of pages	10
Journal	Integrated Ferroelectrics
Volume	41
Issue number	1-4
DOIs	https://doi.org/10.1080/10584580108012810
State	Published - 2001

Keywords

Diamond
Lithium Niobate
Surface acoustic wave

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10.1080/10584580108012810

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title = "Lithium niobate thin films on diamond/silicon substrates for surface acoustic wave filter device applications",

abstract = "Piezoelectricity and surface acoustic wave (SAW) propagation of a LiNbO 3/diamond/silicon multilayer structure are reported for the first time. Theoretical calculations predict lithium niobate thin films on diamond/silicon substrates have both high SAW propagation velocities and high electromechanical coupling coefficients. The metal-organic decomposition (MOD) technique is used to grow lithium niobate thin films on diamond/silicon substrates. X-ray diffraction analysis shows that the lithium niobate films are polycrystalline. SAW devices are fabricated by depositing interdigital transducers (EDTs) onto the LiNbO 3/diamond/silicon films. The SAW activities are observed by measuring the frequency response of the SAW device.",

keywords = "Diamond, Lithium Niobate, Surface acoustic wave",

author = "Rabson, {Thomas A.} and Lee, {Jiun Ting} and Lee, {Tai Chou} and Shunxi Wang and Robert, {Marc A.}",

note = "Funding Information: Acknowledgments The authors are most grateful to Dr. Bob Higgins for supplying masks and the computer program to make experiments possible. We also thank the financial support from the Texas Higher Education Board, the Welch Foundation, and Motorola, Inc; and Sumitomo Electric Industries, LTD. for the diamond coated wafers.",

year = "2001",

doi = "10.1080/10584580108012810",

language = "???core.languages.en_GB???",

volume = "41",

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journal = "Integrated Ferroelectrics",

issn = "1058-4587",

number = "1-4",

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TY - JOUR

T1 - Lithium niobate thin films on diamond/silicon substrates for surface acoustic wave filter device applications

AU - Rabson, Thomas A.

AU - Lee, Jiun Ting

AU - Lee, Tai Chou

AU - Wang, Shunxi

AU - Robert, Marc A.

N1 - Funding Information: Acknowledgments The authors are most grateful to Dr. Bob Higgins for supplying masks and the computer program to make experiments possible. We also thank the financial support from the Texas Higher Education Board, the Welch Foundation, and Motorola, Inc; and Sumitomo Electric Industries, LTD. for the diamond coated wafers.

PY - 2001

Y1 - 2001

N2 - Piezoelectricity and surface acoustic wave (SAW) propagation of a LiNbO 3/diamond/silicon multilayer structure are reported for the first time. Theoretical calculations predict lithium niobate thin films on diamond/silicon substrates have both high SAW propagation velocities and high electromechanical coupling coefficients. The metal-organic decomposition (MOD) technique is used to grow lithium niobate thin films on diamond/silicon substrates. X-ray diffraction analysis shows that the lithium niobate films are polycrystalline. SAW devices are fabricated by depositing interdigital transducers (EDTs) onto the LiNbO 3/diamond/silicon films. The SAW activities are observed by measuring the frequency response of the SAW device.

AB - Piezoelectricity and surface acoustic wave (SAW) propagation of a LiNbO 3/diamond/silicon multilayer structure are reported for the first time. Theoretical calculations predict lithium niobate thin films on diamond/silicon substrates have both high SAW propagation velocities and high electromechanical coupling coefficients. The metal-organic decomposition (MOD) technique is used to grow lithium niobate thin films on diamond/silicon substrates. X-ray diffraction analysis shows that the lithium niobate films are polycrystalline. SAW devices are fabricated by depositing interdigital transducers (EDTs) onto the LiNbO 3/diamond/silicon films. The SAW activities are observed by measuring the frequency response of the SAW device.

KW - Diamond

KW - Lithium Niobate

KW - Surface acoustic wave

UR - http://www.scopus.com/inward/record.url?scp=79957964144&partnerID=8YFLogxK

U2 - 10.1080/10584580108012810

DO - 10.1080/10584580108012810

M3 - 期刊論文

AN - SCOPUS:79957964144

VL - 41

SP - 81

EP - 90

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

SN - 1058-4587

IS - 1-4

ER -

Lithium niobate thin films on diamond/silicon substrates for surface acoustic wave filter device applications

Abstract

Keywords

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