Lissajous scan trajectory with internal model principle controller for fast AFM image scanning

Jim Wei Wu, Yu Ting Lo, Wei Chih Liu, Li Chen Fu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

Atomic force microscopy (AFM) is a very useful measurement instrument. It can scan the conductive and nonconductive samples and without any restriction in the environments of application. Therefore, it has become an indispensable micro-/nano-scale measurement tool. However, controller of the conventional AFMs do not consider the dynamic characteristics of the scan trajectory and mostly use raster scanning easily to induce the mechanical resonance of the scanner. In an attempt to improve these problems for increasing the scan speed and accuracy, we designed an internal model principle (IMP) based neural network complementary sliding mode control (NNCSMC) for tracking a smooth Lissajous trajectory, which can allow an effectively increasing in the scan speed without obviously sacrificing in the scan accuracy. To validate the effectiveness of the proposed scan methodology, we have conducted extensive experiments and promising results have been acquired.

Original languageEnglish
Title of host publication2015 54th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages469-474
Number of pages6
ISBN (Electronic)9784907764487
DOIs
StatePublished - 30 Sep 2015
Event54th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2015 - Hangzhou, China
Duration: 28 Jul 201530 Jul 2015

Publication series

Name2015 54th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2015

Conference

Conference54th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2015
Country/TerritoryChina
CityHangzhou
Period28/07/1530/07/15

Keywords

  • Atomic force microscopy
  • high speed scan
  • internal model principle
  • Lissajous scan trajectory

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