@inproceedings{d589c37321084a14a7ddd2b72bc95b46,
title = "Lissajous scan trajectory with internal model principle controller for fast AFM image scanning",
abstract = "Atomic force microscopy (AFM) is a very useful measurement instrument. It can scan the conductive and nonconductive samples and without any restriction in the environments of application. Therefore, it has become an indispensable micro-/nano-scale measurement tool. However, controller of the conventional AFMs do not consider the dynamic characteristics of the scan trajectory and mostly use raster scanning easily to induce the mechanical resonance of the scanner. In an attempt to improve these problems for increasing the scan speed and accuracy, we designed an internal model principle (IMP) based neural network complementary sliding mode control (NNCSMC) for tracking a smooth Lissajous trajectory, which can allow an effectively increasing in the scan speed without obviously sacrificing in the scan accuracy. To validate the effectiveness of the proposed scan methodology, we have conducted extensive experiments and promising results have been acquired.",
keywords = "Atomic force microscopy, Lissajous scan trajectory, high speed scan, internal model principle",
author = "Wu, {Jim Wei} and Lo, {Yu Ting} and Liu, {Wei Chih} and Fu, {Li Chen}",
note = "Publisher Copyright: {\textcopyright} 2015 The Society of Instrument and Control Engineers-SICE.; 54th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2015 ; Conference date: 28-07-2015 Through 30-07-2015",
year = "2015",
month = sep,
day = "30",
doi = "10.1109/SICE.2015.7285361",
language = "???core.languages.en_GB???",
series = "2015 54th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "469--474",
booktitle = "2015 54th Annual Conference of the Society of Instrument and Control Engineers of Japan, SICE 2015",
}