Liquid salinity sensor based on D-shaped single mode fibers coated with In-Ga-Zn-O thin film

Chuen Lin Tien, Hao Sheng Mao, Hong Yi Lin, Wen Shing Sun

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

This paper presents a new thin-film liquid salinity sensor by using the D-shaped fiber and thin-film coating techniques. The D-shaped fiber will enhance optical fiber to generate an evanescent field in sensing applications. Indium-galliumzinc oxide (IGZO) films can produce high attenuation lossy mode resonance (LMR) to make high-sensitivity liquid salinity fiber sensors. IGZO thin film is prepared by a radio-frequency (RF) magnetron sputtering method. The optical fiber thickness is 67.6 μm and IGZO film thickness of 100 nm is deposited on the polished surface of the D-shaped fiber to fabricate LMR-type liquid salinity sensors. The sensitive region was immersed in different sensing liquid salinities from 0 ‰ to 100 ‰, and attempted to investigate the sensitivities of the LMR salinity sensors. The experimental results show that the highest sensitivity of the salinity sensors for the sensing NaCl solutions is 0.80 nm per salinity unit (SU).

Original languageEnglish
Title of host publicationSecond International Seminar on Photonics, Optics, and Its Applications, ISPhOA 2016
EditorsAgus Muhamad Hatta, Aulia M.T. Nasution
PublisherSPIE
ISBN (Electronic)9781510607514
DOIs
StatePublished - 2016
Event2nd International Seminar on Photonics, Optics, and Its Applications, ISPhOA 2016 - Legian - Kuta, Bali, Indonesia
Duration: 24 Aug 201625 Aug 2016

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10150
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference2nd International Seminar on Photonics, Optics, and Its Applications, ISPhOA 2016
Country/TerritoryIndonesia
CityLegian - Kuta, Bali
Period24/08/1625/08/16

Keywords

  • D-shaped fiber
  • Indium-gallium-zinc oxide (IGZO)
  • Lossy mode resonance (LMR)
  • Salinity sensor

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