Fingerprint
Dive into the research topics of 'Layer splitting process in hydrogen-implanted Si, Ge, SiC, and diamond substrates'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Layer splitting process in hydrogen-implanted Si, Ge, SiC, and diamond substrates
Q. Y. Tong, K. Gutjahr, S. Hopfe, U. Gösele, T. H. Lee
Research output: Contribution to journal › Article › peer-review
210
Scopus
citations