Laser-Induced Graphene Stretchable Strain Sensor with Vertical and Parallel Patterns

Yu Hsin Yen, Chao Shin Hsu, Zheng Yan Lei, Hsin Jou Wang, Ching Yuan Su, Ching Liang Dai, Yao Chuan Tsai

Research output: Contribution to journalArticlepeer-review

Abstract

In intelligent manufacturing and robotic technology, various sensors must be integrated with equipment. In addition to traditional sensors, stretchable sensors are particularly attractive for applications in robotics and wearable devices. In this study, a piezoresistive stretchable strain sensor based on laser-induced graphene (LIG) was proposed and developed. A three-dimensional, porous LIG structure fabricated from polyimide (PI) film using laser scanning was used as the sensing layer of the strain sensor. Two LIG pattern structures (parallel and vertical) were fabricated and integrated within the LIG strain sensors. Scanning electron microscopy, an X-ray energy dispersive spectrometer, and Raman scattering spectroscopy were used to examine the microstructure of the LIG sensing layer. The performance and strain sensing properties of the parallel and vertical stretchable LIG strain sensors were investigated in tensile tests. The relative resistance changes and the gauge factors of the parallel and vertical LIG strain sensors were quantified. The parallel strain sensor achieved a high gauge factor of 15.79 in the applied strain range of 10% to 20%. It also had high sensitivity, excellent repeatability, good durability, and fast response times during the tensile experiments. The developed LIG strain sensor can be used for the real-time monitoring of human motions such like finger bending, wrist bending, and throat swallowing.

Original languageEnglish
Article number1220
JournalMicromachines
Volume13
Issue number8
DOIs
StatePublished - Aug 2022

Keywords

  • gauge factor
  • laser-induced graphene
  • polymer carbonization
  • stretchable strain sensor

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