Laser-induced activation of p-type GaN with the second harmonics of a Nd:YAG laser

Yung Chen Cheng; Chi Chih Liao; Shih Wei Feng; Chih Chung Yang; Yen Sheng Lin; Ma Kung-Jeng; Chang Cheng Chou; Chia Ming Lee; Jen Inn Chyi

doi:10.1143/jjap.40.2143

Laser-induced activation of p-type GaN with the second harmonics of a Nd:YAG laser

Yung Chen Cheng, Chi Chih Liao, Shih Wei Feng, Chih Chung Yang, Yen Sheng Lin, Ma Kung-Jeng, Chang Cheng Chou, Chia Ming Lee, Jen Inn Chyi

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

Magnesium-doped p-type GaN has been activated by irradiation with photons of 532 nm wavelength from the second harmonic of a Q-switched neodymium-doped ytterbium aluminum garnet (Nd:YAG) laser. With appropriate laser fluence levels and irradiation pulse numbers, such a laser-induced activation process resulted in a hole concentration about the same as that obtained through the conventional thermal activation technique. Temperature measurement revealed that the laser-induced process is very unlikely to be thermal. It was speculated that the process might involve the photon-induced breaking of the H-Mg bonds.

Original language	English
Pages (from-to)	2143-2145
Number of pages	3
Journal	Japanese Journal of Applied Physics
Volume	40
Issue number	4 A
DOIs	https://doi.org/10.1143/jjap.40.2143
State	Published - Apr 2001

Keywords

Laser-induced activation
Mg-doped GaN
P-type activation
Thermal activation

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10.1143/jjap.40.2143

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title = "Laser-induced activation of p-type GaN with the second harmonics of a Nd:YAG laser",

abstract = "Magnesium-doped p-type GaN has been activated by irradiation with photons of 532 nm wavelength from the second harmonic of a Q-switched neodymium-doped ytterbium aluminum garnet (Nd:YAG) laser. With appropriate laser fluence levels and irradiation pulse numbers, such a laser-induced activation process resulted in a hole concentration about the same as that obtained through the conventional thermal activation technique. Temperature measurement revealed that the laser-induced process is very unlikely to be thermal. It was speculated that the process might involve the photon-induced breaking of the H-Mg bonds.",

keywords = "Laser-induced activation, Mg-doped GaN, P-type activation, Thermal activation",

author = "Cheng, {Yung Chen} and Liao, {Chi Chih} and Feng, {Shih Wei} and Yang, {Chih Chung} and Lin, {Yen Sheng} and Ma Kung-Jeng and Chou, {Chang Cheng} and Lee, {Chia Ming} and Chyi, {Jen Inn}",

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doi = "10.1143/jjap.40.2143",

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TY - JOUR

T1 - Laser-induced activation of p-type GaN with the second harmonics of a Nd:YAG laser

AU - Cheng, Yung Chen

AU - Liao, Chi Chih

AU - Feng, Shih Wei

AU - Yang, Chih Chung

AU - Lin, Yen Sheng

AU - Kung-Jeng, Ma

AU - Chou, Chang Cheng

AU - Lee, Chia Ming

AU - Chyi, Jen Inn

PY - 2001/4

Y1 - 2001/4

N2 - Magnesium-doped p-type GaN has been activated by irradiation with photons of 532 nm wavelength from the second harmonic of a Q-switched neodymium-doped ytterbium aluminum garnet (Nd:YAG) laser. With appropriate laser fluence levels and irradiation pulse numbers, such a laser-induced activation process resulted in a hole concentration about the same as that obtained through the conventional thermal activation technique. Temperature measurement revealed that the laser-induced process is very unlikely to be thermal. It was speculated that the process might involve the photon-induced breaking of the H-Mg bonds.

AB - Magnesium-doped p-type GaN has been activated by irradiation with photons of 532 nm wavelength from the second harmonic of a Q-switched neodymium-doped ytterbium aluminum garnet (Nd:YAG) laser. With appropriate laser fluence levels and irradiation pulse numbers, such a laser-induced activation process resulted in a hole concentration about the same as that obtained through the conventional thermal activation technique. Temperature measurement revealed that the laser-induced process is very unlikely to be thermal. It was speculated that the process might involve the photon-induced breaking of the H-Mg bonds.

KW - Laser-induced activation

KW - Mg-doped GaN

KW - P-type activation

KW - Thermal activation

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U2 - 10.1143/jjap.40.2143

DO - 10.1143/jjap.40.2143

M3 - 期刊論文

AN - SCOPUS:0035301742

SN - 0021-4922

VL - 40

SP - 2143

EP - 2145

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 4 A

ER -

Laser-induced activation of p-type GaN with the second harmonics of a Nd:YAG laser

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Keywords

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