Laser-induced activation of p-type GaN with the second harmonics of a Nd:YAG laser

Yung Chen Cheng, Chi Chih Liao, Shih Wei Feng, Chih Chung Yang, Yen Sheng Lin, Ma Kung-Jeng, Chang Cheng Chou, Chia Ming Lee, Jen Inn Chyi

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


Magnesium-doped p-type GaN has been activated by irradiation with photons of 532 nm wavelength from the second harmonic of a Q-switched neodymium-doped ytterbium aluminum garnet (Nd:YAG) laser. With appropriate laser fluence levels and irradiation pulse numbers, such a laser-induced activation process resulted in a hole concentration about the same as that obtained through the conventional thermal activation technique. Temperature measurement revealed that the laser-induced process is very unlikely to be thermal. It was speculated that the process might involve the photon-induced breaking of the H-Mg bonds.

Original languageEnglish
Pages (from-to)2143-2145
Number of pages3
JournalJapanese Journal of Applied Physics
Issue number4 A
StatePublished - Apr 2001


  • Laser-induced activation
  • Mg-doped GaN
  • P-type activation
  • Thermal activation


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