Kinetic modeling of the NF₃ decomposition via dielectric barrier discharges in N₂/NF₃ mixtures

Chemical Compounds

• Dielectric Material 95%
• Decomposition 69%
• Plasma 67%
• Mixture 47%
• Simulation 45%
• Electron Particle 19%

Physics & Astronomy

• decomposition 82%
• kinetics 64%
• global warming 54%
• data simulation 41%
• simulation 27%
• reactors 27%
• atoms 18%
• electrons 15%

Engineering & Materials Science

• Plasmas 100%
• Decomposition 78%
• Global warming 40%
• Atoms 37%
• Electrons 36%
• Numerical models 29%